FIELD-EMISSION FROM P-TYPE POLYCRYSTALLINE DIAMOND FILMS

被引：77

作者：

HONG, D

ASLAM, M

机构：

[1] Michigan State Univ, East Lansing

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 02期

关键词：

D O I：

10.1116/1.587962

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Vapor-deposited-diamond field emitters are fabricated using diamond film technology compatible with integrated circuit processing. The field emission data from p-type polycrystalline diamond films are presented. Field emission current in the range of 15 μA was detected at an electric field intensity of <20 MV/m at a pressure of 10-7 Torr. A current of approximately 50 nA was observed at a pressure up to 10-2 Torr in H2 environment.

引用

页码：427 / 430

页数：4

共 24 条

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