Replication of continuous-relief diffractive optical elements by conventional compact disc injection-molding techniques

被引：26

作者：

Nikolajeff, F

Jacobsson, S

Hard, S

Billman, A

Lundbladh, T

Lindell, C

机构：

[1] Department of Microwave Technology, Chalmers University of Technology, Göteborg

[2] Toolex Alpha, Sundbyberg, S-172

来源：

APPLIED OPTICS | 1997年 / 36卷 / 20期

关键词：

diffractive optics; injection molding; replication; electron-beam lithography; compact disc;

D O I：

10.1364/AO.36.004655

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Continuous-relief diffractive optical elements have been replicated by use of conventional compact disc injection-molding techniques. Two continuous-relief microstructures, a blazed grating and a fan-out element, were chosen to evaluate the replication process. Original elements were fabricated by direct-write electron-beam lithography. Optical measurements and atomic force microscopy were used for investigating the replication fidelity. (C) 1997 Optical Society of America.

引用

页码：4655 / 4659

页数：5

共 21 条

[1]

BARALDI L, 1993, P SOC PHOTO-OPT INS, V1992, P21, DOI 10.1117/12.165703

[2] DIRECT INCLUSION OF THE PROXIMITY EFFECT IN THE CALCULATION OF KINOFORMS [J].

BENGTSSON, J .

APPLIED OPTICS, 1994, 33 (22) :4993-4996

[3] APPLICATION OF 3-DIMENSIONAL MICRO-OPTICAL COMPONENTS FORMED BY LITHOGRAPHY, ELECTROFORMING, AND PLASTIC MOLDING [J].

BRENNER, KH ;

KUFNER, M ;

KUFNER, S ;

MOISEL, J ;

MULLER, A ;

SINZINGER, S ;

TESTORF, M ;

GOTTERT, J ;

MOHR, J .

APPLIED OPTICS, 1993, 32 (32) :6464-6469

[4]

COOPS P, 1990, PHILIPS J RES, V44, P481

[5] CONTINUOUS-RELIEF DIFFRACTIVE OPTICAL-ELEMENTS FOR 2-DIMENSIONAL ARRAY GENERATION [J].

GALE, MT ;

ROSSI, M ;

SCHUTZ, H ;

EHBETS, P ;

HERZIG, HP ;

PRONGUE, D .

APPLIED OPTICS, 1993, 32 (14) :2526-2533

[6]

HAVEY TG, 1996, EOS DIGEST SERIES, V9, P20

[7]

JAHNS J, 1992, OPTIK, V89, P98

[8] DIFFRACTION EFFICIENCIES OF THIN PHASE GRATINGS WITH ARBITRARY GRATING SHAPE [J].

MAGNUSSON, R ;

GAYLORD, TK .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1978, 68 (06) :806-809

[9] Replication of diffractive optics in silica glass [J].

Moreshead, W ;

Nogues, JL ;

Howell, L ;

Zhu, BF .

DIFFRACTIVE AND HOLOGRAPHIC OPTICS TECHNOLOGY III, 1996, 2689 :142-152

[10] MEASURING AND MODELING THE PROXIMITY EFFECT IN DIRECT-WRITE ELECTRON-BEAM LITHOGRAPHY KINOFORMS [J].

NIKOLAJEFF, F ;

BENGTSSON, J ;

LARSSON, M ;

EKBERG, M ;

HARD, S .

APPLIED OPTICS, 1995, 34 (05) :897-903

← 1 2 3 →