CONTINUOUS-RELIEF DIFFRACTIVE OPTICAL-ELEMENTS FOR 2-DIMENSIONAL ARRAY GENERATION

被引:79
作者
GALE, MT [1 ]
ROSSI, M [1 ]
SCHUTZ, H [1 ]
EHBETS, P [1 ]
HERZIG, HP [1 ]
PRONGUE, D [1 ]
机构
[1] UNIV NEUCHATEL, INST MICROTECHNOL, CH-2000 NEUCHATEL, SWITZERLAND
来源
APPLIED OPTICS | 1993年 / 32卷 / 14期
关键词
DIFFRACTIVE OPTICAL ELEMENTS; FAN-OUT; LASER-BEAM WRITING LITHOGRAPHY; REPLICATION;
D O I
10.1364/AO.32.002526
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Continuous surface-relief diffractive optical elements for two-dimensional array generation (fan-out) are designed and fabricated. Separable and nonseparable solutions for the two-dimensional element design are compared. The phase-grating microstructures are generated by laser-beam writing lithography in a single exposure step and converted to nickel shims by electroplating, enabling low-cost replicas to be produced by using laboratory and commercial replication processes. Results are presented for a 9 x 9 fan-out diffractive optical element with a measured efficiency of 94% and an overall uniformity within +/-8%; replicas in epoxy have the same efficiency and a uniformity of +/-15%.
引用
收藏
页码:2526 / 2533
页数:8
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