CONTINUOUS-RELIEF DIFFRACTIVE OPTICAL-ELEMENTS FOR 2-DIMENSIONAL ARRAY GENERATION

被引：79

作者：

GALE, MT ^{[1
]}

ROSSI, M ^{[1
]}

SCHUTZ, H ^{[1
]}

EHBETS, P ^{[1
]}

HERZIG, HP ^{[1
]}

PRONGUE, D ^{[1
]}

机构：

[1] UNIV NEUCHATEL, INST MICROTECHNOL, CH-2000 NEUCHATEL, SWITZERLAND

来源：

APPLIED OPTICS | 1993年 / 32卷 / 14期

关键词：

DIFFRACTIVE OPTICAL ELEMENTS; FAN-OUT; LASER-BEAM WRITING LITHOGRAPHY; REPLICATION;

D O I：

10.1364/AO.32.002526

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Continuous surface-relief diffractive optical elements for two-dimensional array generation (fan-out) are designed and fabricated. Separable and nonseparable solutions for the two-dimensional element design are compared. The phase-grating microstructures are generated by laser-beam writing lithography in a single exposure step and converted to nickel shims by electroplating, enabling low-cost replicas to be produced by using laboratory and commercial replication processes. Results are presented for a 9 x 9 fan-out diffractive optical element with a measured efficiency of 94% and an overall uniformity within +/-8%; replicas in epoxy have the same efficiency and a uniformity of +/-15%.

引用

页码：2526 / 2533

页数：8

共 13 条

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