HIGH-EFFICIENCY CONTINUOUS SURFACE-RELIEF GRATINGS FOR 2-DIMENSIONAL ARRAY GENERATION

被引：31

作者：

EHBETS, P ^{[1
]}

HERZIG, HP ^{[1
]}

PRONGUE, D ^{[1
]}

GALE, MT ^{[1
]}

机构：

[1] PAUL SCHERRER INST,CH-8048 ZURICH,SWITZERLAND

来源：

OPTICS LETTERS | 1992年 / 17卷 / 13期

关键词：

D O I：

10.1364/OL.17.000908

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Continuous surface-relief phase gratings for two-dimensional (2-D) array generation have been realized by laser-beam writing lithography. For a 9 X 9 fan-out element, a diffraction efficiency of 94% and a uniformity of better than +/-8% have been achieved. These are, to our knowledge, the best published results for 2-D surface-relief fan-out elements. Separable and nonseparable solutions for the design of 2-D fan-out elements are discussed.

引用

页码：908 / 910

页数：3

共 6 条

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[3] GALE MT, IN PRESS APPL OPT
[4] DESIGN AND FABRICATION OF HIGHLY EFFICIENT FAN-OUT ELEMENTS
HERZIG, HP
PRONGUE, D
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[5] PRONGUE D, IN PRESS APPL OPT
[6] DETOUR-PHASE KINOFORM INTERCONNECTS - THE CONCEPT AND FABRICATION CONSIDERATIONS
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