Charge injection in SrTiO3 thin films

被引：83

作者：

Dietz, GW ^{[1
]}

Waser, R ^{[1
]}

机构：

[1] RHEIN WESTFAL TH AACHEN,INST WERKSTOFFE ELEKTROTECH,D-52056 AACHEN,GERMANY

来源：

THIN SOLID FILMS | 1997年 / 299卷 / 1-2期

关键词：

charging; strontium; titanium oxide;

D O I：

10.1016/S0040-6090(96)09073-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The leakage current behaviour of SrTiO3 thin films was investigated. The commonly reported Schottky emission regime is extended towards low fields for which an ohmic and a saturation regime is found. In addition, the deviation from the Schottky effect towards high fields is explained by applying a more general injection law which is valid over all temperatures and fields and which includes the Schottky approximation as a special case. From this general injection law, the width of the Schottky depletion layer is obtained unambiguously showing that the film is completely depleted. (C) 1997 Elsevier Science S.A.

引用

页码：53 / 58

页数：6

共 34 条

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