Gas temperature measurements by laser spectroscopic techniques and by optical emission spectroscopy

被引:62
作者
Gicquel, A [1 ]
Hassouni, K [1 ]
Breton, Y [1 ]
Chenevier, M [1 ]
Cubertafon, JC [1 ]
机构
[1] UNIV GRENOBLE 1,CNRS URA 008,SPECTROMETRIE PHYS LAB,F-38402 ST MARTIN DHERES,FRANCE
关键词
two-photon allowed transition laser induced fluorescence; diamond plasma spatial analysis; comparison LIF/OES; monitoring;
D O I
10.1016/0925-9635(95)00429-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
H-atom temperatures were measured using two-photon allowed transition laser induced fluorescence in a microwave plasma reactor used for diamond deposition. These temperatures are compared with the rotational temperatures of ground state molecular hydrogen, equal to the gas temperature, measured previously by coherent anti-stokes Raman spectroscopy. We observed an excellent agreement between the two temperatures. Rotational temperatures of the G(1) Sigma{g}(+) electronically excited state of molecular hydrogen were also obtained by measuring the relative line intensities in emission of the R-branch of the G(1) Sigma(g)(+)-->B-1 Sigma{u}(+) (0,0) band by optical emission spectroscopy. These measurements yielded lower temperatures than the gas temperature by 550 K, but followed its variation as a function of the power density. We defined then T-R(G(1)-->{g}(+)) as a spectroscopic parameter useable for optimizing and monitoring the plasma conditions for diamond deposition, within the range of conditions tested here.
引用
收藏
页码:366 / 372
页数:7
相关论文
共 21 条
[1]  
[Anonymous], 1969, ROTATIONAL STRUCTURE
[2]  
BARBEAU C, 1991, ETUDE RGION CATHODIQ
[3]   MEASUREMENT OF ATOMIC-HYDROGEN IN A HOT-FILAMENT REACTOR BY 2-PHOTON LASER-INDUCED FLUORESCENCE [J].
CHENEVIER, M ;
CUBERTAFON, JC ;
CAMPARGUE, A ;
BOOTH, JP .
DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) :587-592
[4]  
Chenevier M., 1995, Proceedings of the Applied Diamond Conference 1995. Applications of Diamond Films and Related Materials: Third International Conference (NIST SP 885), P305
[5]  
CHU HN, 1991, PHYS REV A, V44
[6]   THE MOLECULAR SPECTRUM OF HYDROGEN AND ITS ISOTOPES [J].
DIEKE, GH .
JOURNAL OF MOLECULAR SPECTROSCOPY, 1958, 2 (05) :494-517
[7]  
DRESSLER K, 1977, J MOL SPECTROSC, V67, P416
[8]  
FILHO JDA, 1994, THESIS U ORSAY PARIS, V11
[9]   SPECTROSCOPIC ANALYSIS AND CHEMICAL-KINETICS MODELING OF A DIAMOND DEPOSITION PLASMA REACTOR [J].
GICQUEL, A ;
HASSOUNI, K ;
FARHAT, S ;
BRETON, Y ;
SCOTT, CD ;
LEFEBVRE, M ;
PEALAT, M .
DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) :581-586
[10]  
GICQUEL A, 1995, P WORKSH MICR APPL M, P105