Tribological properties of R-C thin films deposited by magnetron-sputter-ion plating method

被引：33

作者：

Knotek, O

Lugscheider, E

Siry, CW

机构：

[1] RWTH Aachen University of Technology, Materials Science Institute, 52056 Aachen

来源：

SURFACE & COATINGS TECHNOLOGY | 1997年 / 91卷 / 03期

关键词：

tribological properties; B-C thin films; magnetron-sputter-ion plating;

D O I：

10.1016/S0257-8972(96)03105-2

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The material system of boron-carbon (B-C) offers a high variety of properties. Following to an overview on possible material properties the potential of the deposited films by magnetron-sputter-ion plating-PVD is outlined. The influence of target operation condition is reported. Thin films are deposited on several metal substrates. Material properties of the films are described. A tribological evaluation is carried out by several tests like modified pin-on-disk test and taber test to outline wear protection effects on tribosystems with metal counter part.

引用

页码：167 / 173

页数：7

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