Diamond-like carbon: state of the art

Diamond-like carbon films, amorphous hydrogenated or non-hydrogenated forms of carbon, are metastable amorphous materials characterized by attractive mechanical, optical, electrical, chemical and tribological properties. The films can be prepared at low temperatures by different techniques using a large variety of precursors and can be modified by incorporation of different elements such as N, F, Si or metals. The diversity of methods used for the deposition of diamond-like carbon films provides the flexibility to tailor their properties according to specific needs and potential applications. The hydrogenated form of DLC appears to reach a maturity in understanding its properties and finding old and new practical applications for it. The non-hydrogenated diamond-like carbon, or tetrahedral carbon, is at a much younger state of preparation and characterization and practical applications have yet to be proven. The paper will review the state of the art of the preparation of the different types of diamondlike carbon films, the characterization and understanding of their properties, and their practical applications. (C) 1999 Elsevier Science S.A. All rights reserved.