A new characterization tool for vertical profile measurement of high-aspect-ratio microstructures

被引：33

作者：

Lebrasseur, E ^{[1
]}

Pourciel, JB ^{[1
]}

Bourouina, T ^{[1
]}

Masuzawa, T ^{[1
]}

Fujita, H ^{[1
]}

机构：

[1] Univ Tokyo, CNRS IIS, LIMMS, Meguro Ku, Tokyo 1538505, Japan

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2002年 / 12卷 / 03期

关键词：

D O I：

10.1088/0960-1317/12/3/313

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a system for the measurement of the inner profile of high-aspect-ratio microstructures. This system uses silicon micro-probes with a sharp tip at their end and an integrated piezoresistive force sensor. The probes are 1 mm long with a cross-sectional area of 20 x 20 mum(2), which allowed characterization of narrow and deep micro-holes having a radius as small as 40 mum. The measurement procedure utilizes an original algorithm, which prevents it from many unwanted phenomena. It is entirely automated by using a computer control.

引用

页码：280 / 285

页数：6

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