All-optical probing of material structure by second-harmonic generation: Application to piezoelectric aluminum nitride thin films

被引：6

作者：

Blanc, D

Cachard, A

Pommier, JC

机构：

[1] Université Jean Monnet, Lab. Traitement du Sign. et Instrum., UMR CNRS 5516, 42023 Saint-Etienne Cedex 2

来源：

OPTICAL ENGINEERING | 1997年 / 36卷 / 04期

关键词：

thin film characterization; optical diagnostic; second-harmonic generation; piezoelectricity;

D O I：

10.1117/1.601240

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Second-harmonic generation can be used to probe the microstructure of materials. This nondestructive all-optical method is applied to quantify the orientation of the aluminum nitride microcolumns. Theoretical results show that very small tilt angles of the columns are easily detectable. The sensitivity of this technique is confirmed by experimental results, which are compared with piezoelectric measurements. (C) 1997 Society of Photo-Optical Instrumentation Engineers.

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页码：1191 / 1195

页数：5

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