Mechanism and kinetics of ordering in diblock copolymer thin films on chemically nanopatterned substrates

被引:88
作者
Edwards, EW
Stoykovich, MP
Müller, M
Solak, HH
De Pablo, JJ
Nealey, PF [1 ]
机构
[1] Univ Wisconsin, Dept Chem & Biol Engn, Madison, WI 53706 USA
[2] Univ Wisconsin, Ctr Nanotechnol, Madison, WI 53706 USA
[3] Univ Wisconsin, Dept Phys, Madison, WI 53706 USA
[4] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
关键词
annealing; diblock copolymers; directed assembly; lithography; thin films;
D O I
10.1002/polb.20643
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Lamellae forming diblock copolymer domains can be directed to assemble without defects and in registration with chemically nanopatterned substrates. Initially, thin films of the lamellar poly(styrene-b-methyl methacrylate) block copolymer form hexagonally close-packed styrene domains when annealed on chemical nanopatterned striped surfaces. These styrene domains then coalesce to form linear styrene domains that are not fully registered with the underlying chemical surface pattern. Defects coarsen, until defect-free directed assembly is obtained, by breaking linear styrene domains and reforming new structures until registered lamellae have been formed. At all stages in the process, two factors play an important role in the observed degree of registration of the block copolymer domains as a function of annealing time: the interfacial energy between the blocks of the copolymer and the chemically nanopatterned substrate and the commensurability of the bulk repeat period of the block copolymer and the substrate pattern period. Insight into the time-dependent three-dimensional behavior of the block copolymer structures is gained from single chain in mean field simulations. (c) 2005 Wiley Periodicals, Inc.
引用
收藏
页码:3444 / 3459
页数:16
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