Nanoindentation Hardness measurement in piling up SiO2 coating

被引:18
作者
Cabibbo, M. [1 ]
Ciccarelli, D. [1 ]
Spigarelli, S. [1 ]
机构
[1] Univ Politecn Marche, Dipartimento Ingn Ind & Sci Matemat DIISM, I-60131 Ancona, Italy
来源
EUROPEAN CONFERENCE ON NANO FILMS - ECNF2012 | 2013年 / 40卷
关键词
Nanoindentation; pile up; Oliver and Pharr analysis; SiO2; coating; LOAD-DEPTH CURVE; SODA-LIME GLASS; MECHANICAL-PROPERTIES; ELASTIC-MODULUS; CONTACT AREA; PILE-UP; ELASTOPLASTIC PROPERTIES; INDENTATION; CREEP; FILMS;
D O I
10.1016/j.phpro.2012.12.014
中图分类号
TB3 [工程材料学];
学科分类号
082905 [生物质能源与材料];
摘要
In the last decades much attention has been focused on understanding the factors controlling the shape of the unloading curves obtained by the Oliver and Pharr nanoindentation analysis in order to estimate true contact area, and material parameters such as Young's modulus and hardness. In fact, it is well known that the Oliver and Pharr analysis can overestimate the hardness of materials that plastically deform due to piling up around the indentation. In recent years, different visual and analytical methods have been proposed. The visual methods are based on direct measurements of the produced indentation by scanning probe microscopy (SPM) or by atomic force microscopy (AFM). In the present work, indentation hardness of a SiO2 coating was measured and analyzed by both visual and analytical methods. The SPM-based direct method showed a quite good qualitative and quantitative literature data agreement. This method was thus developed and improved to make it dependent on curve parameters, such as applied load and penetration depth, rather than on SPM measurements of the actual contact area. A correlation of the pile up phenomenon to the m exponent of the P = B(h-h(f))(m) relationship was also discussed. (C) 2013 The Authors. Published by Elsevier B.V. Selection and/or peer-review under responsibility of VINF
引用
收藏
页码:100 / 112
页数:13
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