Simulation of sputtering induced by high energy gold clusters

被引:23
作者
Shapiro, MH
Tombrello, TA
机构
[1] Calif State Univ Fullerton, Dept Phys, Fullerton, CA 92834 USA
[2] CALTECH, Div Phys Math & Astron, Pasadena, CA 91125 USA
基金
美国国家科学基金会;
关键词
D O I
10.1016/S0168-583X(99)00141-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Recently Andersen et al. reported exceptionally large nonlinear sputtering yields following the bombardment of gold targets with small, high energy gold clusters (H.H. Andersen, A. Brunelle, S. Della-Negra, J. Depauw, Y. LeBeyec, Phys. Rev. Lett. 80 (1998) 5433). Nonlinearities up to similar to 1000% were observed for Au-5 clusters with a total energy of 800 keV. We have carried out molecular dynamics simulations on a massively parallel computer to model the Au-n --> Au system. The results suggest that both collisional and thermal spike mechanisms contribute to the large nonlinear yields observed by Andersen et al. Our simulations also indicate that sputtering statistics are very important at high cluster bombarding energies. A substantial fraction of the simulated impacts produce no sputtered atoms, while individual sputtering events producing very large numbers of sputtered atoms contribute significantly to the total sputtering yield at high energy. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:221 / 231
页数:11
相关论文
共 11 条
[1]   Giant metal sputtering yields induced by 20-5000 keV atom gold clusters [J].
Andersen, HH ;
Brunelle, A ;
Della-Negra, S ;
Depauw, J ;
Jacquet, D ;
Le Beyec, Y ;
Chaumont, J ;
Bernas, H .
PHYSICAL REVIEW LETTERS, 1998, 80 (24) :5433-5436
[2]  
BROMLEY DA, 1993, MCGRAWHILL ENCY PHYS, P276
[3]   MANY-BODY EMBEDDED-ATOM POTENTIAL FOR DESCRIBING THE ENERGY AND ANGULAR-DISTRIBUTIONS OF RH ATOMS DESORBED FROM ION-BOMBARDED RH(111) [J].
GARRISON, BJ ;
WINOGRAD, N ;
DEAVEN, DM ;
REIMANN, CT ;
LO, DY ;
TOMBRELLO, TA ;
HARRISON, DE ;
SHAPIRO, MH .
PHYSICAL REVIEW B, 1988, 37 (13) :7197-7204
[4]   ROUND-ROBIN COMPUTER-SIMULATION OF ION TRANSMISSION THROUGH CRYSTALLINE LAYERS [J].
GARTNER, K ;
STOCK, D ;
WEBER, B ;
BETZ, G ;
HAUTALA, M ;
HOBLER, G ;
HOU, M ;
SARITE, S ;
ECKSTEIN, W ;
JIMENEZRODRIGUEZ, JJ ;
PEREZMARTIN, AMC ;
ANDRIBET, EP ;
KONOPLEV, V ;
GRASMARTI, A ;
POSSELT, M ;
SHAPIRO, MH ;
TOMBRELLO, TA ;
URBASSEK, HM ;
HENSEL, H ;
YAMAMURA, Y ;
TAKEUCHI, W .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 102 (1-4) :183-197
[5]  
Lindhard J., 1963, VIDENSK SELSK MAT FY, V33, P14
[6]   MOLECULAR-DYNAMICS SIMULATIONS OF ENERGETIC CLUSTER IMPACTS ON AL, CU AND AU TARGETS [J].
SHAPIRO, MH ;
TOMBRELLO, TA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 58 (02) :161-173
[7]   MOLECULAR-DYNAMICS SIMULATIONS OF INELASTIC ENERGY-LOSS EFFECTS IN SPUTTERING [J].
SHAPIRO, MH ;
TOMBRELLO, TA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 90 (1-4) :473-476
[8]  
SHAPIRO MH, 1988, NUCL INSTRUM METH B, V30, P152, DOI 10.1016/0168-583X(88)90111-5
[9]   SPUTTERING FROM ELASTIC-COLLISION SPIKES IN HEAVY-ION-BOMBARDED METALS [J].
SIGMUND, P ;
CLAUSSEN, C .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (02) :990-993
[10]  
SIGMUND P, 1969, PHYS REV, V187, P768, DOI 10.1103/PhysRev.187.768