ROUND-ROBIN COMPUTER-SIMULATION OF ION TRANSMISSION THROUGH CRYSTALLINE LAYERS

Round robin computer simulations were performed by 11 groups using 6 different molecular dynamics codes and 6 different binary collision approximation codes. The process simulated is the transmission of 0.2 keV, 0.5 keV, and 1.0 keV B atoms through 9 monolayers of [001]Si and the transmission of 1.0 keV Ar atoms through 5 monolayers of [001]Cu. In all cases the energy distribution and the angular distribution of the transmitted atoms have been calculated with and without taking into account the interaction between the target atoms. The results of the simulations with the different molecular dynamics codes are in good agreement. The binary collision approximation results are compared with each other and with the molecular dynamics data. Deviations are discussed. It is concluded that the binary collision concept is still applicable for such low energies if simultaneous collisions are taken into account.