On the importance of fifth-order spherical aberration for a fully corrected electron microscope

被引：39

作者：

Chang, LY ^{[1
]}

Kirkland, AI ^{[1
]}

Titchmarsh, JM ^{[1
]}

机构：

[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

来源：

ULTRAMICROSCOPY | 2006年 / 106卷 / 4-5期

基金：

英国工程与自然科学研究理事会;

关键词：

C-s and C-c-corrected microscope; phase contrast theory;

D O I：

10.1016/j.ultramic.2005.09.004

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Next generation aberration correctors will not only eliminate the third-order spherical aberration, but also improve the information limit by correction of chromatic aberration. As a result of these improvements, higher order aberrations, which have largely been neglected in image analysis, will become important. In this paper, we concern ourselves with situations where sub-A resolution can be achieved, and where the third-order spherical aberration is corrected and the fifth-order spherical aberration is measurable. We derive formulae to explore the maximum value of the fifth-order spherical aberration for directly interpretable imaging and discuss the optimum imaging conditions and their applicable range. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：301 / 306

页数：6