Recording studies of sub-micron write heads by focused ion beam trimming

被引:11
作者
Gorman, GL [1 ]
Vo, L [1 ]
Hu, BHL [1 ]
Tsang, C [1 ]
Cser, J [1 ]
Lindquist, J [1 ]
机构
[1] FEI CO,HILLSBORO,OR 97124
关键词
D O I
10.1109/20.617744
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper we discuss the performances of our current inductive write heads which have been processed using conventional lithography, then trimmed at the ABS using focused ion beam to submicron dimensions for very narrow track applications. We demonstrate that for pole-tips of submicron geometries, we are able to achieve adequate write performances. For a 10 turn FIB trimmed head of 0.85 micron final pole width, we achieve an erase width of 0.9 microns, 55% rolloff density at 5500 fc/mm, write threshold of 30 mA, and hard transition shift of 5 nm at write currents of 70 mA.
引用
收藏
页码:2824 / 2826
页数:3
相关论文
共 6 条
[1]  
BRUG JA, 1996, MRS B, P23
[2]   4 Gbit/in.(2) inductive write heads using high moment FeAlN poles [J].
Jayasekara, WP ;
Wang, S ;
Kryder, MH .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) :5880-5882
[3]   Approaches to 10 Gbit/in(2) recording [J].
Kryder, MH ;
Messner, W ;
Carley, LR .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) :4485-4490
[4]   SUBMICRON-TRACKWIDTH INDUCTIVE MR COMPOSITE HEAD [J].
TAKANO, H ;
FUKUOKA, H ;
SUZUKI, M ;
SHIIKI, K ;
KITADA, M .
IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :4678-4683
[5]  
Tsang C, 1996, IEEE T MAGN, V32, P7
[6]  
TSANG C, IN PRESS INTERGMAG 9