Through-mask electrochemical micromachining of titanium

被引：75

作者：

Madore, C ^{[1
]}

Piotrowski, O ^{[1
]}

Landolt, D ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Lab Met Chim, Dept Mat, MXC Ecublens, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1999年 / 146卷 / 07期

关键词：

D O I：

10.1149/1.1391966

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Through-mask electrochemical micromachining has been employed to fabricate well-defined three-dimensional topographies in titanium. Well-controlled shapes with a smooth surface finish were obtained using optimized electrolyte composition and electrochemical parameters. The shape change resulting from electrochemical etching through patterned photoresists were numerically simulated using the boundary element method, assuming the rate of titanium dissolution to be diffusion controlled. A satisfactory agreement was found between experimentally measured and simulated etched profiles. (C) 1999 The Electrochemical Society. S0013-4651(98)10-076-9. All rights reserved.

引用

页码：2526 / 2532

页数：7

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