Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition

被引：27

作者：

Igaki, Jun-ya

Kometani, Reo

Nakamatsu, Ken-ichiro

Kanda, Kazuhiro

Haruyama, Yuichi

Ochiai, Yukinori

Fujita, Jun-ichi

Kaito, Takashi

Matsui, Shinji

机构：

[1] Univ Hyogo, Grad Sch Sci, LASTI, Ako, Hyogo 6781205, Japan

[2] Japan Sci & Technol Co, CREST JST, Kawaguchi, Saitama 3320012, Japan

[3] NEC Fundamental & Environm Res Labs, Tsukuba, Ibaraki 3058051, Japan

[4] Univ Tsukuba, Tsukuba, Ibaraki 3058573, Japan

[5] SII Nanotechnol Inc, Shizuoka 4101393, Japan

来源：

MICROELECTRONIC ENGINEERING | 2006年 / 83卷 / 4-9期

关键词：

focused-ion-beam chemical-vapor-deposition; three-dimensional; nano-sheet; nano-rotor;

D O I：

10.1016/j.mee.2005.12.022

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

Various shapes of three-dimensional nano-rotor have been fabricated using nano-sheet made by 30 kV Ga+ focused-ion-beam chemical-vapor-deposition (FIB-CVD) in the current range from 5 to 200 pA with phenanthrene vapor as a precursor. A nano-rotor moving has been observed using electrostatic attractive force and nitrogen gas blowing. Furthermore, the operational stability of four wings rotor with a longer axis has been confirmed by nitrogen gas blowing. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：1221 / 1224

页数：4

共 4 条

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