Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer?

被引：174

作者：

Liew, LA ^{[1
]}

Liu, YP ^{[1
]}

Luo, RL ^{[1
]}

Cross, T ^{[1
]}

An, LN ^{[1
]}

Bright, VM ^{[1
]}

Dunn, ML ^{[1
]}

Daily, JW ^{[1
]}

Raj, R ^{[1
]}

机构：

[1] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 95卷 / 2-3期

基金：

美国国家科学基金会;

关键词：

SiCN; ceramic; MEMS; fabrication; polymer;

D O I：

10.1016/S0924-4247(01)00723-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the use of photopolymerization of a liquid polysilazane as a novel, versatile and cost-effective means of fabricating SiCN ceramic MEMS. SiCN is a new class of polymer-derived ceramics whose starting material is a liquid-phase polymer. By adding a photo initiator to the precursor, photolithographical patterning of the pre-ceramic polymer can be accomplished by UV exposure. The resulting solid polymer structures are then crosslinked under isostatic pressure, and pyrolyzed to form an amorphous ceramic capable of withstanding over 1500degreesC. By adding and curing successive layers of liquid polymer on top of one another, multi-layered ceramic MEMS can be easily fabricated. The use of photopolymerization can also be used to make thin, membrane-like ceramic structures. Key issues concerning the fabrication process are discussed. By combining photopolymerization with other in-house developed techniques such as polymer-based bonding and flip-chip bonding, three SiCN MEMS devices for high-temperature application,; have been fabricated: an electrostatic actuator, a pressure transducer, and a combustion chamber. These represent a wide range of MEMS, demonstrating the versatility of this technique. (C) 2002 Elsevier Science B.V All rights reserved.

引用

页码：120 / 134

页数：15

共 10 条

[1]

AN L, 2000, P 13 ANN INT C MICR, P619

[2] Optical power induced damage to microelectromechanical mirrors [J].

Burns, DM ;

Bright, VM .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 70 (1-2) :6-14

[3]

Flugge W., 1962, HDB ENG MECH

[4]

Ikuta K., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P42, DOI 10.1109/MEMSYS.1993.296949

[5] Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique [J].