Fountain pen nanochemistry: Atomic force control of chrome etching

被引:74
作者
Lewis, A [1 ]
Kheifetz, Y
Shambrodt, E
Radko, A
Khatchatryan, E
Sukenik, C
机构
[1] Hebrew Univ Jerusalem, Div Appl Phys, Jerusalem, Israel
[2] Bar Ilan Univ, Dept Chem, Ramat Gan, Israel
关键词
D O I
10.1063/1.125120
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this report we demonstrate a general method for affecting chemical reactions with a high degree of spatial control that has potentially wide applicability in science and technology. Our technique is based on complexing the delivery of liquid or gaseous materials through a cantilevered micropipette with an atomic force microscope that is totally integrated into a conventional optical microscope. Controlled etching of chrome is demonstrated without detectable effects on the underlying glass substrate. This simple combination allows for the nanometric spatial control of the whole world of chemical reactions in defined regions of surfaces. Applications of the technique in critical areas such as mask repair are likely. (C) 1999 American Institute of Physics. [S0003-6951(99)02039-2].
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收藏
页码:2689 / 2691
页数:3
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