New bi-directional valve-less silicon micro pump controlled by driving waveform

被引：6

作者：

Hayamizu, S ^{[1
]}

Higashino, K ^{[1
]}

Fujii, Y ^{[1
]}

Sando, Y ^{[1
]}

Yamamoto, K ^{[1
]}

机构：

[1] Minolta Co Ltd, R&D Headquarters, Takatsuki, Osaka 5698503, Japan

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984217

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new bi-directional valve-less silicon micro pump was proposed based on the analysis using an equivalent circuit model, and a performance of the fabricated pump was studied. The flow direction of the pump can be controlled by changing a driving waveform applied to a PZT plate fixed on a diaphragm. The feasibility of this new bi-directional pumping principle was verified by the experimients. The pump generated maximum flow rates of 220 nl/s for forward direction and 190 nl/s for backward direction and maximum pumping pressures of 9.7 kPa for forward direction and 8.3 kPa for backward direction.

引用

页码：113 / 116

页数：4

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