Planar defects in ZnO thin films deposited on optical fibers and flat substrates

The microstructure and the defects of ZnO coatings deposited at room temperature by sputtering onto fibers and flat substrates were characterized using transmission electron microscopy (TEM), scanning electron microscopy, and x-ray diffraction (XRD). XRD shows that the films have a [0001] preferred orientation and a large angular width of the 0002 reflection. According to TEM observations, the film microstructure consists of columnar grains which contain large concentrations of basal planar defects and dislocations. High-resolution transmission electron microscopy analysis and the associated image simulation are in full agreement with the presence of single (type 1) and double (type II) stacking faults. The relation between the observed defects and the 0002 peak broadening is discussed.