Electrical and optical properties of thin indium tin oxide films produced by pulsed laser ablation in oxygen or rare gas atmospheres

被引：26

作者：

Thestrup, B

Schou, J ^{[1
]}

Nordskov, A

Larsen, NB

机构：

[1] Dept Opt & Fluid Dynam, DK-4000 Roskilde, Denmark

[2] Riso Natl Lab, Condensed Matter Phys & Chem Dept, DK-4000 Roskilde, Denmark

来源：

APPLIED SURFACE SCIENCE | 1999年 / 142卷 / 1-4期

关键词：

oxygen atmosphere; rare gas atmosphere; indium tin oxide films; thin films; pulsed laser ablation;

D O I：

10.1016/S0169-4332(98)00659-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Films of indium tin oxide (ITO) have been produced in different background gases by pulsed laser deposition (PLD). The Films deposited in rare gas atmospheres on room temperature substrates were metallic, electrically conductive, but had poor transmission of visible light. For substrate temperatures at 200 degrees C, the specific resistivity was reduced and the transmission of visible light enhanced for all background gases. Films produced in oxygen turned out to be superior to films deposited in other gases at the same temperature. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：248 / 252

页数：5

共 11 条

[1]

Chrisey D. B., 1994, PULSED LASER DEPOSIT

[2] Fabrication and characterization of ITO thin films deposited by excimer laser evaporation [J].