Polymeric optical MEMS

As micro-opto-electro-mechanical systems (MOEMS) and devices evolve from prototypes to products, the need for cost-effective mass production techniques becomes crucial. This challenging cost goal can be reached using mass replication techniques like injection molding and hot embossing. In order to meet the special demands of miniaturization these replication techniques have been modified incorporating variothermal process control, an evacuation of the mold chamber and a modification of the molding parameters including elevated temperatures. Based on these techniques numerous microoptical systems have been developed including a twelvefold multi-fiber connectors with an average insertion loss of 0.35 dB, an optical bench using polymeric alignment structures on a silicon substrate, a 4x4 star coupler with passive fiber alignment (excess loss < 3dB, uniformity < 2dB), a 1x2 singlemode fiber switch (insertion loss < 1dB, switching time < sms), and a singlemode 4x4 optical matrix switch. In these systems geometrical tolerances of one mu m and below have been obtained allowing passive alignment of multimode and singlemode fibers during the assembly process and high precision positioning of fibers during operation.