DEEP X-RAY-LITHOGRAPHY FOR THE PRODUCTION OF 3-DIMENSIONAL MICROSTRUCTURES FROM METALS, POLYMERS AND CERAMICS

In recent years the LIGA technique evolved as a basic fabrication process for the production of a large variety of microstructure products utilizing metals, polymers, ceramics and even glasses. The extreme precision of the microstructure products, their huge structural heights and small lateral dimensions in combination with an inexpensive replication process opens a broad field of application for the fabrication of sensors, actuators, micromechanical components, microoptical systems, electrical and optical microconnectors. Deep X-ray lithography is the most important fabrication step in the sequence of the LIGA technique. It provides a 3-D master microstructure based on a radiation sensitive polymer material, which in general is reproduced in subsequent electroforming and molding processes. The present report deals with the basic technological features of LIGA, gives a detailed description of deep X-ray lithography and presents an overview of the variety of microstructure products fabricated so far.