Thermal and ion irradiation stability of direct current sputtered TiN/B-C-N multilayers

被引:5
作者
Fayeulle, S [1 ]
Nastasi, M [1 ]
Lu, YC [1 ]
Kung, H [1 ]
Tesmer, JR [1 ]
机构
[1] LOS ALAMOS NATL LAB,DIV MAT SCI & TECHNOL,LOS ALAMOS,NM 87545
关键词
D O I
10.1063/1.118496
中图分类号
O59 [应用物理学];
学科分类号
摘要
The response of TiN/B-C-N multilayers to vacuum annealing at 900 degrees C and to 300 keV argon irradiation is studied. Changes in composition, stress field. bilayer repeat length, and layered structure are reported. The modifications observed during thermal annealing are mainly related to the departure of nitrogen because of the initial high state of compressive stress. During irradiation, the viscous flow of atoms perpendicular to the stress field causes an increase of the bilayer repeat length and interdiffusion between each layer. This mechanism leads to relaxation of stress and to the disappearance of the layered structure for higher dose. (C) 1997 American Institute of Physics.
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页码:1098 / 1100
页数:3
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