Demonstration of piezoelectric actuated GaAs-based MEMS tunable VCSEL

被引：27

作者：

Huang, Michael C. Y. ^{[1
]}

Cheng, Kan Bun

Zhou, Ye

Pesala, Bala

Chang-Hasnain, Connie J.

Pisano, Albert P.

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2006年 / 18卷 / 9-12期

关键词：

laser tuning; microelectromechanical systems (MEMS); vertical-cavity surface-emitting laser (VCSEL);

D O I：

10.1109/LPT.2006.873923

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the first experimental demonstration of a novel piezoelectric actuated microelectromechanical systems (MEMS) tunable vertical-cavity surface-emitting laser (VCSEL). A large physical deflection was obtained with the piezoelectric actuated MEMS cantilever beam monolithically integrated with the VCSEL distributed Bragg reflector. Single-mode emission and continuous tuning were achieved at room temperature under continuous-wave operation.

引用

页码：1197 / 1199

页数：3

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