Widely tunable torsional optical filter

被引:34
作者
Mateus, CFR [1 ]
Chang, CH
Chrostowski, L
Yang, S
Sun, DC
Pathak, R
Chang-Hasnain, CJ
机构
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[2] Bandwidth9 Inc, Fremont, CA 94538 USA
基金
美国国家科学基金会;
关键词
DWDM systems; MEMS; optoelectronic devices; optical networks; tunable filter;
D O I
10.1109/LPT.2002.1003104
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A broad range tunable optical filter using a torsional micromechanical structure is presented. The device has a continuous tuning range over 100 rim, from 1500 to 1600 urn, and the structure eliminates the potential catastrophic discharge problem associated with electrostatic micromachines. Transmission of 2.5-Gb/s directly modulated 1550-nm vertical-cavity surface-emitting laser through the tunable filter shows no power penalty.
引用
收藏
页码:819 / 821
页数:3
相关论文
共 8 条
[1]   2 x 2 multiwavelength micromachined AlGaAs/GaAs vertical cavity filter array with wavelength control layer [J].
Amano, T ;
Koyama, F ;
Nishiyama, N ;
Iga, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2000, 39 (7A) :L673-L674
[2]  
CHITICA N, 1997, P 1997 INT C IND PHO
[3]   Top-emitting micromechanical VCSEL with a 31.6-nm tuning range [J].
Li, MY ;
Yuen, W ;
Li, GS ;
Chang-Hasnain, CJ .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1998, 10 (01) :18-20
[4]   Tunable optical filters for dense WDM networks [J].
Sadot, D ;
Boimovich, E .
IEEE COMMUNICATIONS MAGAZINE, 1998, 36 (12) :50-55
[5]  
SENTURIA SD, 2000, MICROSYSTEM DESIGN, P134
[6]  
SUGIHWO F, 1998, IEEE J MEM SYST, V7
[7]   GAAS MICROMACHINED WIDELY TUNABLE FABRY-PEROT FILTERS [J].
VAIL, EC ;
WU, MS ;
LI, GS ;
ENG, L ;
CHANGHASNAIN, CJ .
ELECTRONICS LETTERS, 1995, 31 (03) :228-229
[8]   Electrostatic discharge/electrical overstress susceptibility in MEMS: A new failure mode [J].
Walraven, JA ;
Soden, JM ;
Tanner, DM ;
Tangyunyong, P ;
Cole, EI ;
Anderson, RE ;
Irwin, LW .
MEMS RELIABILITY FOR CRITICAL APPLICATIONS, 2000, 4180 :30-39