共 114 条
[2]
[10]
The analysis of a thin SiO2/Si3N4/SiO2 stack:: A comparative study of low-energy heavy ion elastic recoil detection, high-resolution Rutherford backscattering, and secondary ion mass spectrometry
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
2006, 249
:847-850

