Pulsed-laser deposition of Y-Ba-Cu-O films: The influence of fluence and oxygen pressure

被引：6

作者：

Bierleutgeb, K

Proyer, S

机构：

[1] Angewandte Physik, Johannes-Kepler-Univ. Linz, A-4040 Linz

来源：

APPLIED SURFACE SCIENCE | 1997年 / 109卷

关键词：

pulsed-laser deposition; thin films; Y1Ba2Cu3O7-x;

D O I：

10.1016/S0169-4332(96)00669-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The electrical and morphological properties of YBa2Cu3O7-x (YBCO) films, including the number density of particulates, strongly depend on the oxygen background pressure employed during deposition. The degradation of electrical and morphological film properties observed at low oxygen pressures can be compensated by a decrease in laser fluence, while the number density of particulates increases with decreasing fluence.

引用

页码：331 / 334

页数：4