Hydrogen-induced metastable changes in the electrical conductivity of microcrystalline silicon

被引:7
作者
Nickel, NH [1 ]
Rakel, M [1 ]
机构
[1] Hahn Meitner Inst Berlin GmbH, D-14289 Berlin, Germany
关键词
D O I
10.1103/PhysRevB.65.041301
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The temperature dependence of the electrical dark conductivity sigma(D) of microcrystalline silicon was measured. Rapid thermal cooling resulted in an increase of sigma(D) by two orders of magnitude below 300 K. This frozen-in state is metastable: annealing and a slow cool restores the temperature dependence of the relaxed state. The time and temperature dependence of the relaxation Of sigma(D) reveals that two processes are competing. At short times sigma(D) increases while at long times sigma(D) decreases. The latter process is due to the dissociation of bondcenter H complexes.
引用
收藏
页码:413011 / 413014
页数:4
相关论文
共 20 条
[1]   SIMS ANALYSIS OF DEUTERIUM DIFFUSION IN HYDROGENATED AMORPHOUS SILICON [J].
CARLSON, DE ;
MAGEE, CW .
APPLIED PHYSICS LETTERS, 1978, 33 (01) :81-83
[2]   FREE-ELECTRONS AND DEFECTS IN MICROCRYSTALLINE SILICON STUDIED BY ELECTRON-SPIN-RESONANCE [J].
FINGER, F ;
MALTEN, C ;
HAPKE, P ;
CARIUS, R ;
FLUCKIGER, R ;
WAGNER, H .
PHILOSOPHICAL MAGAZINE LETTERS, 1994, 70 (04) :247-254
[3]  
Gorelkinskii Yu. V., 1987, Soviet Technical Physics Letters, V13, P45
[4]  
Kohlrausch R., 1847, ANN PHYS-NEW YORK, V72, P353
[5]   Hydrogen-oxygen interaction in silicon at around 50°C [J].
Markevich, VP ;
Suezawa, M .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) :2988-2993
[6]   COMPLETE MICROCRYSTALLINE P-I-N SOLAR-CELL - CRYSTALLINE OR AMORPHOUS CELL BEHAVIOR [J].
MEIER, J ;
FLUCKIGER, R ;
KEPPNER, H ;
SHAH, A .
APPLIED PHYSICS LETTERS, 1994, 65 (07) :860-862
[7]  
Mott N. F., 1968, Journal of Non-Crystalline Solids, V1, P1, DOI 10.1016/0022-3093(68)90002-1
[8]  
Newman R. C., 1994, SEMICONDUCT SEMIMET, V42, P289
[9]  
Nickel NH, 1999, SEMICONDUCT SEMIMET, V61, P83
[10]   HYDROGEN-INDUCED METASTABLE CHANGES IN THE ELECTRICAL-CONDUCTIVITY OF POLYCRYSTALLINE SILICON [J].
NICKEL, NH ;
JOHNSON, NM ;
VAN DE WALLE, CG .
PHYSICAL REVIEW LETTERS, 1994, 72 (21) :3393-3396