Design and performance of a laser-plasma-based compact soft x-ray microscope

被引：61

作者：

Johansson, GA ^{[1
]}

Holmberg, A ^{[1
]}

Hertz, HM ^{[1
]}

Berglund, M ^{[1
]}

机构：

[1] Royal Inst Technol, SCFAB, SE-10621 Stockholm, Sweden

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2002年 / 73卷 / 03期

关键词：

D O I：

10.1063/1.1445870

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe the design of a user-friendly compact water-window x-ray microscope. The microscope is based on a lambda=3.37 nm liquid-jet-target laser-plasma source in combination with a normal-incidence multilayer condenser mirror and high-resolution diffractive optics for the imaging. With its high mechanical and thermal stability, the instrument demonstrates enhanced resolution and potential for compact x-ray imaging with the quality of synchrotron-based microscopes. Furthermore, a new sample handling system, computer control, and other improvements facilitate application-oriented x-ray microscopy outside the synchrotron laboratory. (C) 2002 American Institute of Physics.

引用

页码：1193 / 1197

页数：5

共 24 条

[1]

Attwood D., 1999, SOFT XRAYS EXTREME U

[2] Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation [J].

Berglund, M ;

Rymell, L ;

Hertz, HM ;

Wilhein, T .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (06) :2361-2364

[3]

Berglund M, 2000, J MICROSC-OXFORD, V197, P268, DOI 10.1046/j.1365-2818.2000.00675.x

[4]

DIEHL M, 1994, XRAY MICROSCOPY, V4, P374

[5] Enhanced soft x-ray reflectivity of Cr/Sc multilayers by ion assisted sputter deposition [J].

Eriksson, F ;

Johansson, GA ;

Hertz, HM ;

Birch, J .

SOFT X-RAY AND EUV IMAGING SYSTEMS II, 2001, 4506 :84-92

[6] Extreme ultraviolet lithography [J].

Gwyn, CW ;

Stulen, R ;

Sweeney, D ;

Attwood, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06) :3142-3149

[7] Normal-incidence condenser mirror arrangement for compact water-window X-ray microscopy [J].

Hertz, HM ;

Rymell, L ;

Berglund, M ;

Johansson, GA ;

Wilhein, T ;

Platonov, Y ;

Broadway, D .

X-RAY OPTICS, INSTRUMENTS, AND MISSIONS II, 1999, 3766 :247-251

[8] Compact soft x-ray reflectometer based on a line-emitting laser-plasma source [J].

Johansson, GA ;

Berglund, M ;

Eriksson, F ;

Birch, J ;

Hertz, HM .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2001, 72 (01) :58-62

[9]

Kaznacheyev K, 2000, AIP CONF PROC, V507, P395, DOI 10.1063/1.1291178

[10] SOFT-X-RAY MICROSCOPES AND THEIR BIOLOGICAL APPLICATIONS [J].

KIRZ, J ;

JACOBSEN, C ;

HOWELLS, M .

QUARTERLY REVIEWS OF BIOPHYSICS, 1995, 28 (01) :33-130

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