The study of single-chip integrated microfluidic system

被引：3

作者：

Pang, JT ^{[1
]}

Zou, QB ^{[1
]}

Tan, ZM ^{[1
]}

Qian, X ^{[1
]}

Liu, LT ^{[1
]}

Li, ZJ ^{[1
]}

机构：

[1] Tsing Hua Univ, Inst Microelect, Beijing 100084, Peoples R China

来源：

1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/ICSICT.1998.786506

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel single-chip integrated microfluidic system is presented in this paper. After 3D structures formed with deep cavities and stiffness mechanical membrane as sealing I;layer in single-chip, additional standard IC processes ore applied to achieve singlechip integrated microfluidic systems, including micropumps, valves. I:channels, cavities and some different sensors. We have applied different principles, bimetallic and electrostatic; driving, to the driving and controlling of the micropumps and microvalves. The final micropump driving: membrane is 1mm x 1mm x 2 mu m and valve membrane is 6mm X 0.6mm X 2 mu m. Preliminary experiment; show that the on/off flow ratio of the integrated micropump,ump is 180. The results of the sensitivity and the temperature coefficient of the sensors are also reported in this paper.

引用

页码：895 / 898

页数：4