MICROFLOW DEVICES AND SYSTEMS

被引：353

作者：

SHOJI, S ^{[1
]}

ESASHI, M ^{[1
]}

机构：

[1] WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN,TOKYO,TOKYO 169,JAPAN

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1994年 / 4卷 / 04期

关键词：

D O I：

10.1088/0960-1317/4/4/001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.

引用

页码：157 / 171

页数：15

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