Fabrication and application of polymer coated cantilevers as gas sensors

被引：30

作者：

Maute, M

Raible, S

Prins, FE

Kern, DP

Weimar, U

Göpel, W

机构：

[1] Institute of Applied Physics, University of Tübingen, 72076 Tübingen

[2] Inst. for Phys. and Theor. Chemistry, University of Tübingen, 72076 Tübingen

来源：

MICROELECTRONIC ENGINEERING | 1999年 / 46卷 / 1-4期

关键词：

D O I：

10.1016/S0167-9317(99)00128-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have fabricated SiNx cantilevers which can be used for applications as miniaturized gas sensors. Cantilevers were coated with polydimethylsiloxane as a chemically sensitive layer and the additional mass loading by the absorption of gas molecules was detected by measuring the change of the resonance frequency of the structures. For the detection of n-octane a sensitivity of -0.099 Hz/ppm is obtained. This value is comparable to the sensitivity of conventional quartz crystal microbalances. The simultaneous detection of the resonance frequencies of different cantilevers for analyzing a gas mixture is demonstrated.

引用

页码：439 / 442

页数：4

共 8 条

[1] IC microtransducers - New components with old materials? [J].