Two-dimensional model of a direct current glow discharge: Description of the electrons, argon ions, and fast argon atoms

被引:80
作者
Bogaerts, A [1 ]
Gijbels, R [1 ]
Goedheer, WJ [1 ]
机构
[1] FOM, INST PLASMAFYS, NL-3430 BE NIEUWEGEIN, NETHERLANDS
关键词
D O I
10.1021/ac9510651
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
To improve the analytical results of techniques that use the glow discharge as spectroscopic source, a good insight into the glow discharge is desirable, This can be obtained by mathematical modeling. In this work, a two-dimensional model is developed to describe the electrons, argon ions, and fast argon atoms in a direct current glow discharge in argon, The model consists of a Monte Carlo model for the fast electrons, a Monte Carlo model for the argon ions and fast argon atoms in the cathode dark space, and a fluid model for the argon ions and slow electrons. Results in two dimensions are presented for a standard flat cell of the VG 9000 glow discharge mass spectrometer (VG Elemental, Fisons); they include the densities, mean energies, and collision rates of the plasma species, the potential distribution, and the axial and radial electric fields.
引用
收藏
页码:2296 / 2303
页数:8
相关论文
共 52 条
[1]   ALACANT - MODELING OF GLOW-DISCHARGE SPUTTERING SYSTEMS [J].
ABRIL, I .
COMPUTER PHYSICS COMMUNICATIONS, 1988, 51 (03) :413-422
[2]   TRANSITION BETWEEN DIFFERENT REGIMES OF RF GLOW-DISCHARGES [J].
BELENGUER, P ;
BOEUF, JP .
PHYSICAL REVIEW A, 1990, 41 (08) :4447-4459
[3]   A MONTE-CARLO ANALYSIS OF AN ELECTRON SWARM IN A NONUNIFORM FIELD - THE CATHODE REGION OF A GLOW-DISCHARGE IN HELIUM [J].
BOEUF, JP ;
MARODE, E .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (11) :2169-2187
[4]   A TWO-DIMENSIONAL MODEL OF DC GLOW-DISCHARGES [J].
BOEUF, JP .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (05) :1342-1349
[5]   PSEUDOSPARK DISCHARGES VIA COMPUTER-SIMULATION [J].
BOEUF, JP ;
PITCHFORD, LC .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :286-296
[6]   NUMERICAL-MODEL OF RF GLOW-DISCHARGES [J].
BOEUF, JP .
PHYSICAL REVIEW A, 1987, 36 (06) :2782-2792
[7]   MONTE-CARLO SIMULATION OF AN ANALYTICAL GLOW-DISCHARGE - MOTION OF ELECTRONS, IONS AND FAST NEUTRALS IN THE CATHODE DARK SPACE [J].
BOGAERTS, A ;
VANSTRAATEN, M ;
GIJBELS, R .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1995, 50 (02) :179-196
[8]   HYBRID MONTE-CARLO FLUID MODEL OF A DIRECT-CURRENT GLOW-DISCHARGE [J].
BOGAERTS, A ;
GIJBELS, R ;
GOEDHEER, WJ .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2233-2241
[9]   THE ROLE OF FAST ARGON IONS AND ATOMS IN THE IONIZATION OF ARGON IN A DIRECT-CURRENT GLOW-DISCHARGE - A MATHEMATICAL SIMULATION [J].
BOGAERTS, A ;
GIJBELS, R .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (11) :6427-6431
[10]   Role of sputtered Cu atoms and ions in a direct current glow discharge: Combined fluid and Monte Carlo model [J].
Bogaerts, A ;
Gijbels, R .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (03) :1279-1286