Two-dimensional model of a direct current glow discharge: Description of the electrons, argon ions, and fast argon atoms

被引:80
作者
Bogaerts, A [1 ]
Gijbels, R [1 ]
Goedheer, WJ [1 ]
机构
[1] FOM, INST PLASMAFYS, NL-3430 BE NIEUWEGEIN, NETHERLANDS
关键词
D O I
10.1021/ac9510651
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
To improve the analytical results of techniques that use the glow discharge as spectroscopic source, a good insight into the glow discharge is desirable, This can be obtained by mathematical modeling. In this work, a two-dimensional model is developed to describe the electrons, argon ions, and fast argon atoms in a direct current glow discharge in argon, The model consists of a Monte Carlo model for the fast electrons, a Monte Carlo model for the argon ions and fast argon atoms in the cathode dark space, and a fluid model for the argon ions and slow electrons. Results in two dimensions are presented for a standard flat cell of the VG 9000 glow discharge mass spectrometer (VG Elemental, Fisons); they include the densities, mean energies, and collision rates of the plasma species, the potential distribution, and the axial and radial electric fields.
引用
收藏
页码:2296 / 2303
页数:8
相关论文
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