Measurement of drift mobility in AlGaN GaN heterostructure field-effect transistor

被引:88
作者
Dang, XZ [1 ]
Asbeck, PM
Yu, ET
Sullivan, GJ
Chen, MY
McDermott, BT
Boutros, KS
Redwing, JM
机构
[1] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA
[2] Rockwell Int Sci Ctr, Thousand Oaks, CA 91358 USA
[3] Epitron ATMI, Phoenix, AZ 85027 USA
关键词
D O I
10.1063/1.124214
中图分类号
O59 [应用物理学];
学科分类号
摘要
Low-field mobilities for electrons in the channel of an Al0.15Ga0.85N/GaN heterostructure field-effect transistor are derived from direct current transistor characteristics. The dependencies of mobility on gate bias, sheet carrier concentration, and temperature are obtained. For negative gate bias voltages, mobility is found to increase monotonically with increasing sheet carrier concentration, which we interpret as a consequence of increased screening of carrier scattering. For positive gate bias voltages, mobility is found to decrease with increasing gate bias due to the onset of parallel conduction in the AlGaN barrier layer. The mobility varies approximately as T-alpha with alpha approximate to 1.6-1.8 for temperature ranging from 200 to 400 K, indicating that phonon scattering is dominant in the two-dimensional electron gas in this temperature range. (C) 1999 American Institute of Physics. [S0003-6951(99)01225-5].
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收藏
页码:3890 / 3892
页数:3
相关论文
共 15 条
[1]  
[Anonymous], 1981, PHYS SEMICONDUCTOR D
[2]   AlGaN/GaN HEMTs grown on SiC substrates [J].
Binari, SC ;
Redwing, JM ;
Kelner, G ;
Kruppa, W .
ELECTRONICS LETTERS, 1997, 33 (03) :242-243
[3]   High-power microwave 0.25-μm gate doped-channel GaN/AlGaN heterostructure field effect transistor [J].
Chen, Q ;
Yang, JW ;
Gaska, R ;
Khan, MA ;
Shur, MS ;
Sullivan, GJ ;
Sailor, AL ;
Higgings, JA ;
Ping, AT ;
Adesida, I .
IEEE ELECTRON DEVICE LETTERS, 1998, 19 (02) :44-46
[4]   MOBILITY OF THE TWO-DIMENSIONAL ELECTRON-GAS AT SELECTIVITY DOPED N-TYPE ALXGA1-XAS/GAAS HETEROJUNCTIONS WITH CONTROLLED ELECTRON CONCENTRATIONS [J].
HIRAKAWA, K ;
SAKAKI, H .
PHYSICAL REVIEW B, 1986, 33 (12) :8291-8303
[5]   Electron mobility in AlxGa1-xN/GaN heterostructures [J].
Hsu, L ;
Walukiewicz, W .
PHYSICAL REVIEW B, 1997, 56 (03) :1520-1528
[6]  
KHAN MA, 1995, APPL PHYS LETT, V67, P1429
[7]   Mobility of two-dimensional electrons in AlGaN/GaN modulation-doped field-effect transistors [J].
Oberhuber, R ;
Zandler, G ;
Vogl, P .
APPLIED PHYSICS LETTERS, 1998, 73 (06) :818-820
[8]   EFFECT OF THREADING DISLOCATIONS ON MOBILITY IN SELECTIVELY DOPED HETEROSTRUCTURES GROWN ON SI SUBSTRATES [J].
OHORI, T ;
OHKUBO, S ;
KASAI, K ;
KOMENO, J .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (07) :3681-3683
[9]   LOW-TEMPERATURE TWO-DIMENSIONAL MOBILITY OF A GAAS HETEROLAYER [J].
PRICE, PJ .
SURFACE SCIENCE, 1984, 143 (01) :145-156
[10]   Two-dimensional electron gas properties of AlGaN/GaN heterostructures grown on 6H-SiC and sapphire substrates [J].
Redwing, JM ;
Tischler, MA ;
Flynn, JS ;
Elhamri, S ;
Ahoujja, M ;
Newrock, RS ;
Mitchel, WC .
APPLIED PHYSICS LETTERS, 1996, 69 (07) :963-965