PSF measurement of imaging detectors with an x-ray microbeam

被引：23

作者：

Takano, H ^{[1
]}

Suzuki, Y ^{[1
]}

Uesugi, K ^{[1
]}

Takeuchi, A ^{[1
]}

Yagi, N ^{[1
]}

机构：

[1] Japan Synchrotron Radiat Res Inst, JASRI SPring 8, Mikazuki, Hyogo 6795198, Japan

来源：

X-RAY MICRO- AND NANO-FOCUSING: APPLICATIONS AND TECHNIQUES II | 2001年 / 4499卷

关键词：

x-ray microbeam; point spread function; x-ray imaging detector; FZP; SPring-8;

D O I：

10.1117/12.450230

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Point spread functions (PSF) of some kinds of x-ray imaging detectors are directly measured using x-ray microbeam. The experiment has been performed at bending magnet beamline BL20B2 and undulator beamline BL20XU of SPring-8. The microbeam is focused using a Fresnel zone plate (FZP) with coherent illumination to 0.3 mum (almost outermost zone width of the FZP). The imaging detectors are put at the focal plane and directly detect the microbeam. Two types of high spatial resolving detectors are tested. One is x-ray-electron conversion type with electro-magnetic lens, and spatial resolution is estimated to 0.7 gm. The other is x-ray-visible light conversion type with optical lens and the spatial resolution is estimated to 1.0 mum.

引用

页码：126 / 133

页数：8

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