Properties of vanadium oxide thin films for ethanol sensor

被引：65

作者：

Micocci, G ^{[1
]}

Serra, A ^{[1
]}

Tepore, A ^{[1
]}

Capone, S ^{[1
]}

Rella, R ^{[1
]}

Siciliano, P ^{[1
]}

机构：

[1] IST STUDIO NUOVI MAT ELETT,IME CNR,I-73100 LECCE,ITALY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1997年 / 15卷 / 01期

关键词：

D O I：

10.1116/1.580471

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Thin films of vanadium oxides for ethanol sensor applications were been prepared by means of rf reactive sputtering from a vanadium pentoxide target in an Ar-O-2 atmosphere. Films with the best sensitivity and selectivity were obtained with 15% oxygen at a working temperature between 280 and 300 degrees C. These films show a very low sensitivity to CO, CO2, and CH4 and total insensivity to NH3. (C) 1997 American Vacumm Society.

引用

页码：34 / 38

页数：5

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