General phase-stepping algorithm with automatic calibration of phase steps

被引：23

作者：

Wei, CL

Chen, MY

Wang, ZL

机构：

[1] Shanghai Univ, Dept Commun Engn, Shanghai 201800, Peoples R China

[2] Shanghai Univ, Dept Precis Mech Engn, Shanghai 201800, Peoples R China

[3] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

来源：

OPTICAL ENGINEERING | 1999年 / 38卷 / 08期

关键词：

phase-stepping algorithm; Lissajous figures; interferometry;

D O I：

10.1117/1.602190

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new general algorithm for phase-stepping interferometry is presented. The calculation of the phase distribution is composed of three least-squares fitting procedures for an analysis of real interferograms. First, we calculate the initial phase distribution utilizing Lissajous figures and elliptic least-squares fitting. Second, we calculate the phase steps through the spatial least-squares fitting. Finally, we calculate the exact phase distribution through the serial least-squares fitting. Both insensitivity to phase-step errors and automatic calibration of phase steps for the new algorithm are confirmed by experiment. (C) 1999 Society of Photo-Optical Instrumentation Engineers.

引用

页码：1357 / 1360

页数：4

共 8 条

[1] DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].