Polymer based waveguiding structures obtained by ion beam irradiation at different energies

被引：14

作者：

Brunner, S ^{[1
]}

Ruck, DM ^{[1
]}

Tinschert, K ^{[1
]}

Frank, WFX ^{[1
]}

Knodler, B ^{[1
]}

机构：

[1] DEUTSCH TELEKOM,FTZ,D-64276 DARMSTADT,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 107卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)01040-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Polymethylmethacrylate (PMMA) samples were modified by ion beam irradiation in order to generate regions of increased refractive index. Ion beams of various atomic masses and energies were used. Planar waveguides as well as structured waveguides were generated. Passive components, e.g. splitters and Mach-Zehnder interferometers, were fabricated. Applying ion beams of 1.4 MeV/u energies the generated structures are buried in a certain depth. Different masking techniques were used. First results with a newly developed material (PMMI) are presented. Attenuation measurements at different wavelengths are reported.

引用

页码：333 / 336

页数：4

共 8 条

[1] WAVE-GUIDING STRUCTURES IN POLYMERS BY ION-IMPLANTATION [J].

BRUNNER, S ;

RUCK, DM ;

FRANK, WFX ;

LINKE, F ;

SCHOSSER, A ;

BEHRINGER, U .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4) :373-378

[2] ION-BEAM MODIFICATION OF ELECTROOPTICAL CRYSTALS [J].

BUCHAL, C .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 (pt 2) :1142-1146

[3]

DARRAUD C, 1994, APPL OPTICS, V3, P3338

[4]

KLABUNDE J, 1992, P LINAC 92 OTT

[5] OPTICAL WAVE-GUIDES IN POLYMERIC MATERIAL BY ION-IMPLANTATION [J].

RUCK, DM ;

BRUNNER, S ;

FRANK, W ;

KULISCH, J ;

FRANKE, H .

SURFACE & COATINGS TECHNOLOGY, 1992, 51 (1-3) :318-323

[6]

RUCK DM, 1991, NUCL TRACKS RAD MEAS, V19, P951

[7]

SCHOSSER A, 1993, THESIS TH DARMSTADT

[8]

Ziegler JF, 1985, STOPPING RANGES IONS

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