共 13 条
[1]
CREATION OF NEAR-INTERFACE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON SILICON-NITRIDE HETEROJUNCTIONS - THE ROLE OF HYDROGEN
[J].
PHYSICAL REVIEW B,
1987, 36 (11)
:6217-6220
[2]
Karim KS, 2002, INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, P215, DOI 10.1109/IEDM.2002.1175816
[5]
Optimization of n+ μc-Si:H contact layer for low leakage current in a-Si:H thin film transistors
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2000, 18 (02)
:685-687
[8]
DEFECT POOL IN AMORPHOUS-SILICON THIN-FILM TRANSISTORS
[J].
PHYSICAL REVIEW B,
1992, 45 (08)
:4160-4170
[10]
POWELL MJ, 1983, APPL PHYS LETT, V43, P15