Drain-bias dependence of threshold voltage stability of amorphous silicon TFTs

被引:140
作者
Karim, KS [1 ]
Nathan, A
Hack, M
Milne, WI
机构
[1] Simon Fraser Univ, Sch Engn Sci, Burnaby, BC V5A 1S6, Canada
[2] Univ Waterloo, Waterloo, ON N2L 3G1, Canada
[3] Universal Display Corp, Ewing, NJ 08618 USA
[4] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
关键词
amorphous silicon; thin-film transistor (TFT); threshold voltage; metastability;
D O I
10.1109/LED.2004.825154
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Amorphous silicon (a-Si:H) thin-film transistors (TFTs) used in emerging, nonswitch applications such as analog amplifiers or active loads, often have a bias at the drain terminal in addition to the gate that can alter their threshold voltage (V-T) stability performance. At small gate stress voltages (0 less than or equal to V-ST less than or equal to 15 V) where the defect state creation instability mechanism is dominant, the presence of a bias at the TFT drain decreases the overall shift in V-T(DeltaV(T)) compared to the DeltaV(T) in the absence of a drain bias. The measured shift in VT appears to agree with the defect pool model that the DeltaV(T) is proportional to the number of induced carriers in the a-Si:H channel.
引用
收藏
页码:188 / 190
页数:3
相关论文
共 13 条
[1]   CREATION OF NEAR-INTERFACE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON SILICON-NITRIDE HETEROJUNCTIONS - THE ROLE OF HYDROGEN [J].
JACKSON, WB ;
MOYER, MD .
PHYSICAL REVIEW B, 1987, 36 (11) :6217-6220
[2]  
Karim KS, 2002, INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, P215, DOI 10.1109/IEDM.2002.1175816
[3]   STATIC AND DYNAMIC ANALYSIS OF AMORPHOUS-SILICON FIELD-EFFECT TRANSISTORS [J].
LEROUX, T .
SOLID-STATE ELECTRONICS, 1986, 29 (01) :47-58
[4]   BIAS-STRESS-INDUCED STRETCHED-EXPONENTIAL TIME-DEPENDENCE OF CHARGE INJECTION AND TRAPPING IN AMORPHOUS THIN-FILM TRANSISTORS [J].
LIBSCH, FR ;
KANICKI, J .
APPLIED PHYSICS LETTERS, 1993, 62 (11) :1286-1288
[5]   Optimization of n+ μc-Si:H contact layer for low leakage current in a-Si:H thin film transistors [J].
Murthy, RVR ;
Servati, P ;
Nathan, A ;
Chamberlain, SG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (02) :685-687
[6]   BIAS DEPENDENCE OF INSTABILITY MECHANISMS IN AMORPHOUS-SILICON THIN-FILM TRANSISTORS [J].
POWELL, MJ ;
VANBERKEL, C ;
FRENCH, ID ;
NICHOLLS, DH .
APPLIED PHYSICS LETTERS, 1987, 51 (16) :1242-1244
[7]   TIME AND TEMPERATURE-DEPENDENCE OF INSTABILITY MECHANISMS IN AMORPHOUS-SILICON THIN-FILM TRANSISTORS [J].
POWELL, MJ ;
VANBERKEL, C ;
HUGHES, JR .
APPLIED PHYSICS LETTERS, 1989, 54 (14) :1323-1325
[8]   DEFECT POOL IN AMORPHOUS-SILICON THIN-FILM TRANSISTORS [J].
POWELL, MJ ;
VANBERKEL, C ;
FRANKLIN, AR ;
DEANE, SC ;
MILNE, WI .
PHYSICAL REVIEW B, 1992, 45 (08) :4160-4170
[9]   BIAS-STRESS-INDUCED CREATION AND REMOVAL OF DANGLING-BOND STATES IN AMORPHOUS-SILICON THIN-FILM TRANSISTORS [J].
POWELL, MJ ;
DEANE, SC ;
MILNE, WI .
APPLIED PHYSICS LETTERS, 1992, 60 (02) :207-209
[10]  
POWELL MJ, 1983, APPL PHYS LETT, V43, P15