CREATION OF NEAR-INTERFACE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON SILICON-NITRIDE HETEROJUNCTIONS - THE ROLE OF HYDROGEN

被引：104

作者：

JACKSON, WB

MOYER, MD

机构：

来源：

PHYSICAL REVIEW B | 1987年 / 36卷 / 11期

关键词：

D O I：

10.1103/PhysRevB.36.6217

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：6217 / 6220

页数：4

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