An X-ray diffraction study of epitaxial TiN/NbN superlattices

被引：41

作者：

Madan, A ^{[1
]}

Yashar, P ^{[1
]}

Shinn, M ^{[1
]}

Barnett, SA ^{[1
]}

机构：

[1] NORTHWESTERN UNIV,DEPT MAT SCI & ENGN,EVANSTON,IL 60208

来源：

THIN SOLID FILMS | 1997年 / 302卷 / 1-2期

基金：

美国国家科学基金会;

关键词：

X-ray diffraction; superlattices; nitrides;

D O I：

10.1016/S0040-6090(97)00023-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

X-ray diffraction measurements and simulations were carried out to characterize the composition modulation and structure of TiN/NbN superlattices. A trapezoidal/sawtooth form of the composition wave was assumed. Random d-spacing fluctuations with Gaussian width approximately 0.002 nm and layer thickness variations of 0.1-0.5 nm were incorporated to match the observed broadening of the peaks. Best fits to the experimental data showed that considerable interdiffusion was present, with up to 15 at.% metal substitution within the layers and interface widths of 0.4-2.0 nm. The interface width values agreed well with those used in hardness enhancement calculations for epitaxial TiN/NbN superlattices. (C) 1997 Elsevier Science S.A.

引用

页码：147 / 154

页数：8

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