A Thomson scattering diagnostic system for measurement of electron properties of processing plasmas

被引：24

作者：

Bowden, MD ^{[1
]}

Goto, Y ^{[1
]}

Yanaga, H ^{[1
]}

Howarth, PJA ^{[1
]}

Uchino, K ^{[1
]}

Muraoka, K ^{[1
]}

机构：

[1] Kyushu Univ, Interdisciplinary Grad Sch Engn Sci, Kasuga, Fukuoka 816, Japan

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1999年 / 8卷 / 02期

关键词：

D O I：

10.1088/0963-0252/8/2/002

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

In recent years, the method of incoherent Thomson scattering has been used in the study of grow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy high-repetition-rate YAG laser a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5 x 10(16) m(-3).

引用

页码：203 / 209

页数：7

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