共 5 条
[3]
USEFULNESS OF MAGNETIC NEUTRAL LOOP DISCHARGE PLASMA IN PLASMA PROCESSING
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1995, 34 (5A)
:2476-2481
[4]
APPLICATION OF RADIOFREQUENCY DISCHARGED PLASMA PRODUCED IN CLOSED MAGNETIC NEUTRAL LINE FOR PLASMA PROCESSING
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1994, 33 (1A)
:L43-L44
[5]
PLASMA PRODUCTION USING ENERGETIC MEANDERING ELECTRONS
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1995, 34 (8A)
:4213-4216