Bi-directional fast flow sensor with a large dynamic range

In this article an extended mass-Row sensor is presented. Apart from the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the how This is of interest for the flow sensor market in general, and more in particular for the safety monitoring of low over-pressure systems like surgeries and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 mu m s(-1) airflow up to high Row levels of 1 m s(-1). The response time is of the order of milliseconds.