High precision density comparison measurement of silicon crystals by the pressure of flotation method

被引:26
作者
Waseda, A [1 ]
Fujii, K [1 ]
机构
[1] Natl Res Lab Metrol, Tsukuba, Ibaraki 3058563, Japan
关键词
density; density comparator; silicon crystal; Avogadro constant; pressure of flotation method;
D O I
10.1088/0957-0233/12/12/303
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The development of a new density comparison measurement system for silicon crystals using the pressure of flotation method (PFM) is described. The effective isothermal compressibility of a flotation liquid mixture of 1,2,3-tribromopropane and 1.2-dibromoethane is obtained. Density comparison measurements are presented for silicon spheres of mass I kg from the National Research Laboratory of Metrology (NRLM) for the density standard and the determination of the Avogadro constant. The combined relative uncertainty of PFM density comparison measurement for S4 and S5 NRLM silicon spheres is 5 x 10(-8). Adjusted densities are calculated from the comparison and absolute measurements based on a least-squares analysis through a matrix formulation.
引用
收藏
页码:2039 / 2045
页数:7
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