Density comparison measurement of silicon by pressure of flotation method

被引：11

作者：

Waseda, A ^{[1
]}

Fujii, K ^{[1
]}

机构：

[1] Natl Res Lab Metrol, Tsukuba, Ibaraki 3058563, Japan

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2001年 / 50卷 / 02期

关键词：

density; silicon crystal; Avogadro constant; pressure of flotation;

D O I：

10.1109/19.918202

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a new density comparison measurement system for silicon crystals using the pressure of flotation method (PFM) to evaluate the consistency in the absolute densities and to study defect and impurity effects on silicon single crystals. We have carried out density comparison measurements for the density standard and Avogadro constant silicon spheres of the National Research Laboratory of Metrology (NRLM), Ibaraki, Japan. We have calculated the adjusted densities from our comparison and absolute measurements based on a least-squares analysis using a matrix formulation.

引用

页码：604 / 607

页数：4

共 6 条

[1] Determination of the Avogadro constant by accurate measurement of the molar volume of a silicon crystal [J].